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Reactive-Sintered Low-Thermal-Expansion Cordierite Ceramic with High Stiffness

Y. Guo, Y. Guo, Y. Ge, W. Liu, J. Zhao, J. Zhang, J. Zhang, S. Wang, S. Wang

Journal of Ceramic Science and Technology, Vol. 15, No. 2 (2024), pp. 69-78

DOI: 10.4416/JCST2024-00003

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Abstract

Low-coefficient of thermal expansion (CTE)-cordierite ceramic is one of the key materials for integrated circuit substrates, lithography machines and space telescope mirrors. Cordierite ceramic with high stiffness was produced by means of reactive sintering combined with hot isostatic pressing (HIP) treatment. This paper investigated thoroughly the phase evolution and densification processes. The cordierite phase formed at 1 160 °C, and only the cordierite phase and a small amount of residual spinel phase were present in the ceramic above 1 300 °C. Meanwhile, the shrinkage of the sintered body was clearly observed from 1 130 °C and the densification rate reached a maximum at 1 190 °C. After pre-sintering at 1 350 °C and followed by 1 310 °C HIP, fully dense cordierite ceramic was obtained, and its specific stiffness and CTE reached 57.5 MPa·m3·kg-1, 1.75×10-6/°C (25 – 800 °C), respectively, i.e. values better than those of commercial cordierite products.

Keywords

Cordierite ceramics, reactive sintering. low coefficient of thermal expansion, phase evolution

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