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Reactive-Sintered Low-Thermal-Expansion Cordierite Ceramic with High Stiffness
Y. Guo1,2, Y. Ge1, W. Liu1, J. Zhao1, J. Zhang1,2, S. Wang1,2
1 State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, 200050, China.
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
received March 22, 2024, received in revised form April 12, 2024, accepted April 16, 2024
Vol. 15, No. 2, Pages 69-78 DOI: 10.4416/JCST2024-00003
Abstract
Low-coefficient of thermal expansion (CTE)-cordierite ceramic is one of the key materials for integrated circuit substrates, lithography machines and space telescope mirrors. Cordierite ceramic with high stiffness was produced by means of reactive sintering combined with hot isostatic pressing (HIP) treatment. This paper investigated thoroughly the phase evolution and densification processes. The cordierite phase formed at 1 160 °C, and only the cordierite phase and a small amount of residual spinel phase were present in the ceramic above 1 300 °C. Meanwhile, the shrinkage of the sintered body was clearly observed from 1 130 °C and the densification rate reached a maximum at 1 190 °C. After pre-sintering at 1 350 °C and followed by 1 310 °C HIP, fully dense cordierite ceramic was obtained, and its specific stiffness and CTE reached 57.5 MPa·m3·kg-1, 1.75×10-6/°C (25 – 800 °C), respectively, i.e. values better than those of commercial cordierite products.
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Keywords
Cordierite ceramics, reactive sintering. low coefficient of thermal expansion, phase evolution
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