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Journal of Ceramic Science and Technology

The Journal of Ceramic Science and Technology publishes original scientific articles on all topics of ceramic science and technology from all ceramic branches. The focus is on the scientific exploration of  the relationships between processing, microstructure and properties of sintered ceramic materials as well as on new processing routes for innovative ceramic materials. The papers may have either theoretical or experimental background. A high quality of publications will be guaranteed by a thorough double blind peer review process.

The Journal is published by Göller Verlag GmbH on behalf of the Deutsche Keramische Gesellschaft (DKG). Edited by Yu-Ping Zeng, Shanghai Institute of Ceramics, Chinese Academy of Sciences, China.

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Fabrication of Tin-Doped Indium Oxide Thin Films Using Aerosol Deposition

Y. Hasegawa, Y. Sato, S. Yoshikado

Graduate School of Science and Engineering, Doshisha University

received September 6, 2016, received in revised form October 25, 2016, accepted November 4, 2016

Vol. 7, No. 4, Pages 429-432   DOI: 10.4416/JCST2016-00067

Abstract

Tin-doped indium oxide (ITO) thin films are a key material for optical devices owing to their high electrical conductivity and high optical transparency. In this study, ITO thin films were formed on glass and sapphire substrates at room temperature using aerosol deposition (AD), and their crystal structure, resistivity, and optical properties were investigated. The films maintained the crystal structure of the source ITO particles used to form the films. For the glass substrate, the resistivity of the ITO films was approximately 3.0 × 10-3 Ω·cm. In addition, when the thickness was 0.24 μm, the film exhibited high optical transmittance of approximately 90 % in the visible light region, which is higher than that of commercially available ITO thin film. The results show that AD can be used to fabricate ITO films with low resistivity and high optical transmittance.

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Keywords

Tin-doped indium oxide, thin film, aerosol deposition, room-temperature impact consolidation, resistivity

References

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