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Fabrication of Tin-Doped Indium Oxide Thin Films Using Aerosol Deposition
Y. Hasegawa, Y. Sato, S. Yoshikado
Graduate School of Science and Engineering, Doshisha University
received September 6, 2016, received in revised form October 25, 2016, accepted November 4, 2016
Vol. 7, No. 4, Pages 429-432 DOI: 10.4416/JCST2016-00067
Abstract
Tin-doped indium oxide (ITO) thin films are a key material for optical devices owing to their high electrical conductivity and high optical transparency. In this study, ITO thin films were formed on glass and sapphire substrates at room temperature using aerosol deposition (AD), and their crystal structure, resistivity, and optical properties were investigated. The films maintained the crystal structure of the source ITO particles used to form the films. For the glass substrate, the resistivity of the ITO films was approximately 3.0 × 10-3 Ω·cm. In addition, when the thickness was 0.24 μm, the film exhibited high optical transmittance of approximately 90 % in the visible light region, which is higher than that of commercially available ITO thin film. The results show that AD can be used to fabricate ITO films with low resistivity and high optical transmittance.
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Keywords
Tin-doped indium oxide, thin film, aerosol deposition, room-temperature impact consolidation, resistivity
References
1 Nirmal Peiris, T.A., Ghanizadeh, S., Jayathilake, D.S.Y., Hutt, D.A., Wijayantha K.G.U., Conway, P.P., Southee, D.J., Parkin, I.P., Marchand, P., Darr, J.A., Carmalt, C.J.: Aerosol-assisted fabrication of tin-doped indium oxide ceramic thin films from nanoparticle suspensions, J. Mater. Chem. C, 4, 5739 – 5746, (2016).
2 Akedo, J., Ichiki, M., Kikuchi, K., Maeda, R.: Fabrication of three-dimensional microstructure composed of different materials using excimer laser ablation and jet molding, In: IEEE Proc. of MEMS 135 – 140, (1997).
3 Akedo, J., Lebedev, M.: Ceramics coating technology based on impact adhesion phenomenon with ultrafine particles aerosol deposition method for high speed coating at low temperature, Materia Japan, 41, 459 – 466, (2002).
4 Akedo, J., Lebedev, M.: Microstructure and electrical properties of lead zirconate titanate (Pb(Zr52/Ti48)O3) thick films deposited by aerosol deposition method, Jpn. J. Appl. Phys., 38, 5397 – 5401, (1999).
5 Yuki, K., Uemichi, Y., Sato, Y., Yoshikado, S.: Fabrication of nanoporous titanium dioxide films using aerosol deposition, Key Eng. Mater., 566, 195 – 198, (2013).
6 Akedo, J., Lebedev, M., Iwata, A., Ogiso, H., Nakano, S.: Aerosol deposition method (ADM) for nano-crystal ceramics coating without firing, MRS Proceedings, 778, U8.10.1/W7.10.3, (2003).
7 Lebedev, M., Akedo, J., Ito, T.: Substrate heating effects on hardness of an α-Al2O3 thick film formed by aerosol deposition method, J. Cryst. Growth, 275, 1301 – 1306, (2005).
8 Brankovi, Z., Brankovi, G., Tuci, A., Radojkovic, A., Longo, E., Varela, J.A.: Aerosol deposition of Ba0.8Sr0.2TiO3 thin films, Sci. Sinter., 41, 303 – 308, (2009).
9 Sweet, M.L., Pestov, D., Tepper, G.C., McLeskey, J.T., Jr.: Electrospray aerosol deposition of water soluble polymer thin films, Appl. Surf. Sci., 289, 150 – 154, (2014).
10 Exner, J., Fuierer, P., Moos, R.: Aerosol deposition of (Cu,Ti) substituted bismuth vanadate films, Thin Solid Films, 573, 185 – 190, (2014).
11 Hsiao, C.C., Luo, L.S.: Gas sensors fabricated by aerosol deposition, Appl. Mech. Mater., 541 – 542, 151 – 154, (2014).
12 Cullity, B.D., Stock, S.R: Elements of x-ray diffraction, 3rd Ed., Prentice-Hall Inc., pp. 167 – 171, (2001).
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