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Journal of Ceramic Science and Technology

The Journal of Ceramic Science and Technology publishes original scientific articles on all topics of ceramic science and technology from all ceramic branches. The focus is on the scientific exploration of  the relationships between processing, microstructure and properties of sintered ceramic materials as well as on new processing routes for innovative ceramic materials. The papers may have either theoretical or experimental background. A high quality of publications will be guaranteed by a thorough double blind peer review process.

The Journal is published by Göller Verlag GmbH on behalf of the Deutsche Keramische Gesellschaft (DKG). Edited by Yu-Ping Zeng, Shanghai Institute of Ceramics, Chinese Academy of Sciences, China.

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Micro-Positioning Stages for Adaptive Optics Based on Piezoelectric Thick Film Actuators

S. Gebhardt, D. Ernst, B. Bramlage, O. Pabst, A. Oberdörster

Fraunhofer Institute for Ceramic Technologies and Winterbergstr. 28, D-01277 Dresden, Germany

received September 9, 2015, received in revised form November 3, 2015, accepted November 10, 2015

Vol. 6, No. 4, Pages 285-290   DOI: 10.4416/JCST2015-00060

Abstract

Piezoceramic actuators based on thick film technology offer the opportunity of integrated solutions for smart microsystems. Especially in adaptive micro-optics, where the height of devices is limited, outgassing has to be inhibited and complex actuator structures are required, screen-printed actuators are of great interest. The paper highlights our recent research on micro-positioning stages for integration into a plenoptic camera. The first concept is based on through-thickness polarized lead zirconate titanate (PZT) thick films printed on a 45 mm x 44 mm x 0.17 mm LTCC (Low-Temperature Cofired Ceramics) frame with 4-mm-wide legs. Driving with an electrical field of 2 kV/mm resulted in an upright stroke of 115 µm. The second concept combines through-thickness and in-plane polarized thick films on four cantilever beams of an Al2O3-based micro-positioning stage. Because of the combination of d31- and d33-mode of excitation, each cantilever beam will provide an s-shaped bending profile allowing for a planar and tilt-free lift of 130 µm at an electrical field of 1.66 kV/mm. Both actuator concepts were utilized to adjust position of a micro-lens array between main lens and image sensor in a plenoptic camera setup. With that, the working range of the plenoptic camera could be extended.

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Keywords

PZT, thick film, screen printing, actuator, adaptive optics

References

1 Adelson, E., Wang, J.: Single lens stereo with a plenoptic camera, IEEE T. Pattern Anal., 14, 99 – 106, (1992).

2 Ng, R.: Fourier slice photography, ACM T. Graphics (TOG), 24, 735 – 744, (2005).

3 Ng, R., Levoy, M., Brédif, M., Duval, G., Horowitz, M., Hanrahan, P.: Light field photography with a hand-held plenoptic camera, Stanford Tech Report CTSR 2005 – 02, (2005).

4 Oberdörster, A., Lensch, H.P.A.: Adaptive DOF for plenoptic cameras. In: Proceedings of SPIE – the international society for optical engineering. Burlingame, CA, United States, 2013.

5 Ernst, D., Bramlage, B., Gebhardt S., Schönecker, A.: High performance screen printed PZT thick film actuators using in plane polarisation, Adv. Appl. Ceram., 114, 237 – 242, (2015).

6 Ernst, D., Bramlage, B., Gebhardt, S., Oberdörster, Wippermann, F.: Plenoptic Camera with Adaptable Depth of Field Using PZT Thick Film Actuators. In: Proceedings of the ACTUATOR 14. Bremen, Germany, 2014.

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