Articles
All articles | Recent articles
Materials and Processes of Microelectronic Packaging including Low-Temperature Cofired Ceramics Technology (Past, Present and Future)
Y. Imanaka
Fujitsu Laboratories Ltd. Devices & Materials Research Laboratories, 10 – 1 Morinosato-wakamiya, Atsugi-shi, 243 – 0197 Japan
received August 28, 2015, received in revised form October 16, 2015, accepted October 29, 2015
Vol. 6, No. 4, Pages 291-300 DOI: 10.4416/JCST2015-00050
Abstract
As semiconductor technology advances and computers become smaller with higher functionality, the technology has extended into a variety of areas, such as Information Technology (IT)-enabled household electronics, Information Communication Technology (ICT) devices, electronic automobiles and Intelligent Transport Systems (ITS) transport networks, to enrich people's lives. Packaging technology serves as a vital bridge between semiconductor chips and computer systems. Its considerable value is recognized in the constant contributions it makes in bringing about a prosperous life. This paper addresses the two mainstream areas of high-end computers and consumer products, with a special focus on the ceramic materials and process technology of the packaging technologies field at the primary packaging level. Drawing on the past and present developments in these areas as well as future prospects, the paper elucidates the significance of ceramics in packaging including Low-Temperature Cofired Ceramics (LTCC).
Download Full Article (PDF)
Keywords
Low-temperature cofired ceramics (LTCC), microelectronic packaging, flexible electronics, aerosol-type nanoparticle deposition (NPD), embedded passive
References
1 Tummala, R.R.: Microelectronics packaging handbook. Hill, 1988.
2 Clark, B.T., Hill, Y.M.: IBM multi-chip multi-layer ceramic modules for LSI chips-design for performance and density. IEEE Trans. CHMT, 89 – 93, (1980).
3 NIKKEIELECTRONICS. June 22nd, 172 – 200, 1981.
4 NIKKEIELECTRONICS. October 26th, 176 – 199, 1981.
5 NIKKEIELECTRONICS. January, 71 – 72, 1989.
6 Imanaka, Y.: Multilayered low temperature cofired ceramics (LTCC) technology. Springer, 2005.
7 Yamamoto, H., Fujisaki, A., Kikuchi, S.: MCM and bare chips technology for wide range of computers. In: Proceedings of 46th Electronic Components and Technology Conf. 113 – 138, Orlando, FL, May. 1996.
8 Imanaka, Y., Notis, M. R.: Metallization of high thermal conductivity materials, MRS Bulletin, 26, 471 – 476, (2001)
9 International Technology Roadmap for Semiconductors. 2005 Edition. Semiconductor Industry Association, 2005.
10 Fujitsu Press Release. February 2nd, 2011.
11 NIKKEI MICRODEVICES. February 12th, 99 – 123, 2007.
12 NIKKEI ELECTRONICS. No. 842, March 3rd, 57 – 64, 2003.
13 Imanaka, Y., Akedo, J.: Integrated RF module produced by aerosol deposition method. In: Proceedings of 54th Electronic Components and Technology Conf. 1614 – 1621, Las Vegas, NV, June. 2004.
14 Imanaka, Y., Hayashi, N., Takenouchi, M., Akedo, J.: Aerosol deposition for post-LTCC, J. Eur. Ceram. Soc., 27, 2789 – 2795, (2007).
15 Imanaka, Y., Akedo, J.: Embedded capacitor technology using aerosol deposition, Int. J. Appl. Technol., 7, E23 – E32, (2010).
16 Rogers, J.A., Someya, T., Huang Y.: Materials and mechanics for stretchable electronics, Science, 327, 1603 – 1607, (2010).
17 Wagner, S., Bauer, S.: Materials for stretchable electronics, MRS Bulletin, 37, 207 – 213, (2012).
18 Park, I., Ko, S.H., Pan, H., Grigoropoulos, C.P., Pisano, A.P., Frechet, J.M.J., Lee, E.S., Jeong, J.H.: Nanoscale patterning and electronics on flexible substrate by direct nanoimprinting of metallic nanoparticles, Adv. Mater., 20, 489 – 496, (2008).
19 Nathan, A., Ahnood, A., Cole, M.T., Lee, S., Suzuki, Y., Hiralal, P., Bonaccorso, F., Hasan, T., Garcia-Gancedo, L., Dyadyusha, A., Haque, S., Andrew, P., Hofmann, S., Moultrie, J., Chu, D., Flewitt, A.J., Ferrari, A.C., Kelly, M.J., Robertson, J., Amaratunga, G.A.J., Milne, W.I.: Flexible Electronics: the next ubiquitous platform, Proc. IEEE, 100, 1486 – 1517, (2012).
20 Waku, S. et al.: Classification and dielectric characteristics of the boundary layer ceramic dielectrics (BL Dielectrics). In: Review of the Electrical Communication Laboratory. 665 – 679. Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation, 1971.
21 Imanaka, Y., Amada, H., Kumasaka, F.: Microstructure and dielectric properties of composite films for embedded capacitor applications, Int. J. Appl. Ceram. Technology, 8, 653 – 657, (2011).
22 Imanaka, Y., Amada, H., Kumasaka, F.: Dielectric and insulating properties of embedded capacitor for flexible electronics prepared by aerosol-type nanoparticle deposition, Jpn. J. Appl. Phys., 52, 05DA02 – 1-5, (2013).
23 Imanaka, Y., Amada, H., Kumasaka, F., Takahashi, N., Yamasaki, T., Ohfuchi, M., Kaneta, C.: Nanoparticulated dense and stress-free ceramic thick film for material integration, Adv. Eng. Mater., 15, 1129 – 1135, (2013).
24 Hoffman, R.L., Norris, B.J., Wager, J.F.: ZnO-based transparent thin-film transistors, Appl. Phys. Lett., 82, 733 – 735, (2003).
25 Imanaka, Y.: Special Issue: looking back on the progress of 50 years of electronic ceramics, (in Japanese), Bulletin of the Ceramic Society of Japan, 50, 827 – 828, (2015).
Copyright
Göller Verlag GmbH