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Development of a Novel Sensor-Actuator-Module with Ceramic Multilayer Technology
Markus Flössel1, Sylvia Gebhardt2, Andreas Schönecker2, Alexander Michaelis1
1 TU Dresden, Institute of Material Science, 01062 Dresden, Germany
2 Fraunhofer Institute of Ceramic Technologies and Systems, Winterbergstrasse 28, 01277 Dresden, Germany
received April 08, 2010, received in revised form July 29, 2010, accepted August 10, 2010
Vol. 1, No. 1, Pages 55-58 DOI: 10.4416/JCST2010-00010
Abstract
There is a need for low-profile piezoelectric modules directly integrated into structural components like lightweight metals to control the vibration and noise of thin-walled structures and components.
This paper reports on a new module design based on LTCC/PZT multilayers. The newly developed packaging technology entails the lamination of sintered PZT ceramic plates with LTCC green layers and subsequent sintering. This module design has the advantage of complete encasement of the PZT by the insulating carrier material. The approach combines LTCC microsystems technology and piezo technology and allows for tremendous consolidation of functional integration, e.g. sensing, actuation and electronic control. Ferroelectric hysteresis loops and deflection of LTCC/PZT modules glued onto steel plates were measured and compared with reference steel plates based on PZT plates. LTCC/PZT modules showed a maximum deflection of around 130 μm in the static mode and above 550 μm in the dynamic mode with a resonance frequency of 19.7 Hz. Single LTCC/PZT modules with optimum design were integrated into an aluminium matrix prepared by metal die casting in cooperation with the University of Erlangen-Nuremberg. X-ray analysis was performed to show that the LTCC/PZT modules survived this manufacturing step without cracks, confirming the vision of adaptive metal structures in the automotive and machine engineering industries.
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Keywords
LTCC, PZT, sensor, actuator, multilayer technology, aluminium die casting
References
1 Neugebauer, R., Wittstock, V. , Gebhardt, S., Schönecker, A., Structure-Integrated Actorics in Mechanical Engineering (in German), Adaptronic Congress, 9. (2005).
2 Wierach, P., Monner, H. P., Schoenecker, A., Duerr, J. K., Application-specific design of adaptive structures with piezoceramic patch actuators, Proc. Spie, 4698, 333, (2002).
3 Ast, A.,Eberhard, P., Active vibration control for a machine tool with parallel kinematics and adaptronic actuator, J. Comput. Nonlinear Dynam., 4, No.3, 031004 8 pp., (2009).
4 Ogando, J., Adaptronic vibration control, Design News, 62, No. 9, 33-37, (2007).
5 Boller, C., Adaptronic Systems for Aerospace Applications, at – Automatisierungstechnik,: 54, 6, 276-283, (2006).
6 Priya, S., Weidenkaff, A., Norton, D. P., Advances in Electronic Ceramics II, Vol. 30, Issue 9, Kap. 18: Piezoelectric Fiber Composite Fabrication, Wiley, (2009).
7 Rübner, M., Körner, C. and Singer, R. F., Integration of Piezoceramic Modules into Die Castings – Procedure and Functionalities, Adv Sci Tech, 56, 170-175, 2008.
8 Bräutigam, V., Körner, C., Singer, R.F., Kaltenbacher, M., Meiler, M., Lerch, R., Smart structural components by integration of sensor/actuator-modules in die castings, Proc. Spie, 6527, (2007).
9 Brunhuber, E., Praxis der Druckgussfertigung (Pressure-Casting-Based Manufacturing), 4th edition, Schiele & Schön Verlag, Berlin, (1991).
10 Neugebauer, R., Large-Scale Series Production Technologies for Light-Metal- and Fibre-Composite-Based Components with Integrated Piezosensors and Actuators (in German), Proc. 2nd Scient. Symp. of SFB/TR 39 SFB/TR 39, Chemnitz, 69-75, (2009).
10 Neugebauer, R., Large-Scale Series Production Technologies for Light-Metal- and Fibre-Composite-Based Components with Integrated Piezosensors and Actuators (in German), Proc. 2nd Scient. Symp. of SFB/TR 39 SFB/TR 39, Chemnitz, 69-75, (2009).
11 Kinzy Jones, W, Liu, Y., Larsen, B. Wang, P., Zampino, M., Chemical Structural and Mechanical Properties of the LTCC Tapes, IJMEP, 23, No. 4 (2000).
12 Ursic, H., Hrovat, M., Belavic, D., Cilensek, J., Drnovsek, S., Holc, J., Santo Zarnik, M., Kosec, M., Microstructural and electrical characterisation of PZT thick films on LTCC substrates, J. Eur. Ceram. Soc., 28, 1839-1844, (2008).
13 Flössel, M., Investigations of the Influence of the Chemical Compostion of the Substrate Material on the Properties of a Lead Zirconate Titanate (PZT) Thick Film (in German), Ph.D. Thesis, Technische Universität Dresden, (2007).
14 Rabe, T., Schiller, W., Hochheimer, T.,Modes, C., Kipka, A., Zero Shrinkage of LTCC by Self-Constrained Sintering, Int. J. Appl. Ceram. Technol., 2 [5], 374-382, (2005).
Copyright
© 2010 Göller Verlag
Acknowledgments
The financial support of the German Research Foundation (SFB/Transregio 39 "PT-PIESA") is gratefully acknowledged. The authors wish to thank Mr Matthias Rübner from the University of Erlangen-Nuremberg (Institute of Science and Technology of Metals) for the aluminium die casting experiments.
