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Journal of Ceramic Science and Technology

The Journal of Ceramic Science and Technology publishes original scientific articles on all topics of ceramic science and technology from all ceramic branches. The focus is on the scientific exploration of  the relationships between processing, microstructure and properties of sintered ceramic materials as well as on new processing routes for innovative ceramic materials. The papers may have either theoretical or experimental background. A high quality of publications will be guaranteed by a thorough double blind peer review process.

The Journal is published by Göller Verlag GmbH on behalf of the Deutsche Keramische Gesellschaft (DKG). Edited by Yu-Ping Zeng, Shanghai Institute of Ceramics, Chinese Academy of Sciences, China.

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Articles

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Development of a Novel Sensor-Actuator-Module with Ceramic Multilayer Technology

Markus Flössel1, Sylvia Gebhardt2, Andreas Schönecker2, Alexander Michaelis1

1 TU Dresden, Institute of Material Science, 01062 Dresden, Germany
2 Fraunhofer Institute of Ceramic Technologies and Systems, Winterbergstrasse 28, 01277 Dresden, Germany

received April 08, 2010, received in revised form July 29, 2010, accepted August 10, 2010

Vol. 1, No. 1, Pages 55-58   DOI: 10.4416/JCST2010-00010

Abstract

There is a need for low-profile piezoelectric modules directly integrated into structural components like lightweight metals to control the vibration and noise of thin-walled structures and components.

This paper reports on a new module design based on LTCC/PZT multilayers. The newly developed packaging technology entails the lamination of sintered PZT ceramic plates with LTCC green layers and subsequent sintering. This module design has the advantage of complete encasement of the PZT by the insulating carrier material. The approach combines LTCC microsystems technology and piezo technology and allows for tremendous consolidation of functional integration, e.g. sensing, actuation and electronic control. Ferroelectric hysteresis loops and deflection of LTCC/PZT modules glued onto steel plates were measured and compared with reference steel plates based on PZT plates. LTCC/PZT modules showed a maximum deflection of around 130 μm in the static mode and above 550 μm in the dynamic mode with a resonance frequency of 19.7 Hz. Single LTCC/PZT modules with optimum design were integrated into an aluminium matrix prepared by metal die casting in cooperation with the University of Erlangen-Nuremberg. X-ray analysis was performed to show that the LTCC/PZT modules survived this manufacturing step without cracks, confirming the vision of adaptive metal structures in the automotive and machine engineering industries.

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Keywords

LTCC, PZT, sensor, actuator, multilayer technology, aluminium die casting

References

1 Neugebauer, R., Wittstock, V. , Gebhardt, S., Schönecker, A., Structure-Integrated Actorics in Mechanical Engineering (in German), Adaptronic Congress, 9. (2005).

2 Wierach, P., Monner, H. P., Schoenecker, A., Duerr, J. K., Application-specific design of adaptive structures with piezoceramic patch actuators, Proc. Spie, 4698, 333, (2002).

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8 Bräutigam, V., Körner, C., Singer, R.F., Kaltenbacher, M., Meiler, M., Lerch, R., Smart structural components by integration of sensor/actuator-modules in die castings, Proc. Spie, 6527, (2007).

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10 Neugebauer, R., Large-Scale Series Production Technologies for Light-Metal- and Fibre-Composite-Based Components with Integrated Piezosensors and Actuators (in German), Proc. 2nd Scient. Symp. of SFB/TR 39 SFB/TR 39, Chemnitz, 69-75, (2009).

10 Neugebauer, R., Large-Scale Series Production Technologies for Light-Metal- and Fibre-Composite-Based Components with Integrated Piezosensors and Actuators (in German), Proc. 2nd Scient. Symp. of SFB/TR 39 SFB/TR 39, Chemnitz, 69-75, (2009).

11 Kinzy Jones, W, Liu, Y., Larsen, B. Wang, P., Zampino, M., Chemical Structural and Mechanical Properties of the LTCC Tapes, IJMEP, 23, No. 4 (2000).

12 Ursic, H., Hrovat, M., Belavic, D., Cilensek, J., Drnovsek, S., Holc, J., Santo Zarnik, M., Kosec, M., Microstructural and electrical characterisation of PZT thick films on LTCC substrates, J. Eur. Ceram. Soc., 28, 1839-1844, (2008).

13 Flössel, M., Investigations of the Influence of the Chemical Compostion of the Substrate Material on the Properties of a Lead Zirconate Titanate (PZT) Thick Film (in German), Ph.D. Thesis, Technische Universität Dresden, (2007).

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Copyright

© 2010 Göller Verlag

Acknowledgments

The financial support of the German Research Foundation (SFB/Transregio 39 "PT-PIESA") is gratefully acknowledged. The authors wish to thank Mr Matthias Rübner from the University of Erlangen-Nuremberg (Institute of Science and Technology of Metals) for the aluminium die casting experiments.

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